Fabrication and characterization of ferroelectric Pb(ZrxTi1-x)O3 thin films by metalorganic chemical vapor deposition

Title
Fabrication and characterization of ferroelectric Pb(ZrxTi1-x)O3 thin films by metalorganic chemical vapor deposition
Authors
송한상김태송김창은정형진
Keywords
ferroelectric thin film; MOCVD; PZT
Issue Date
1999-02
Publisher
Journal of materials research
Citation
VOL 14, NO 2, 487-493
URI
http://pubs.kist.re.kr/handle/201004/22747
ISSN
0884-2914
Appears in Collections:
KIST Publication > Article
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