Visible photoluminescence from a-Si:H films grown by ultrahigh vacuum electron cyclotron resonance chemical vapor deposition

Title
Visible photoluminescence from a-Si:H films grown by ultrahigh vacuum electron cyclotron resonance chemical vapor deposition
Authors
주성재임승현최원철김은규윤의준Denise C. MarraEray S. Aydil
Keywords
ECR-CVD
Issue Date
1999-04
Publisher
Abstracts of MRS 1999 Spring Meeting
Citation
, 95-95
URI
http://pubs.kist.re.kr/handle/201004/22762
Appears in Collections:
KIST Publication > Conference Paper
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