Characteristics of Mo-tip field emitter arrays as a function of etching method to form the gate-insulating opening

Title
Characteristics of Mo-tip field emitter arrays as a function of etching method to form the gate-insulating opening
Authors
Hoon Kim주병권Jin Jang오명환
Keywords
FED; FEA; MEMS
Issue Date
1999-07
Publisher
IVMC '99
Citation
, 42-43
URI
http://pubs.kist.re.kr/handle/201004/22778
Appears in Collections:
KIST Publication > Conference Paper
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