Sensing characteristics of WOx films deposited by r.f. sputtering for NOx gas sensor

Title
Sensing characteristics of WOx films deposited by r.f. sputtering for NOx gas sensor
Authors
김태송윤영수김용범정형진유광수
Keywords
NO//x sensor; WO3 thin films; gas sensor
Issue Date
1999-07
Publisher
Journal of the Korean Physical Society
Citation
VOL 35, S424-S429
URI
http://pubs.kist.re.kr/handle/201004/22787
ISSN
0374-4884
Appears in Collections:
KIST Publication > Article
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