Preparation and characterization of organic-inorganic hybrid materials incorporating voids via Sol-Gel reaction for interlayer dielectrics

Title
Preparation and characterization of organic-inorganic hybrid materials incorporating voids via Sol-Gel reaction for interlayer dielectrics
Authors
백남석김환규황승상홍순만
Keywords
organic-inorganic hybrid; Sol-Gel Reaction; Interlayer Dielectrics
Issue Date
1999-09
Publisher
The 10th Korea-Japan Joint Forum (KJF'99)
Citation
, 107-107
URI
http://pubs.kist.re.kr/handle/201004/22791
Appears in Collections:
KIST Publication > Conference Paper
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE