A 40 nm nano-mold lithography

Title
A 40 nm nano-mold lithography
Authors
박창민최범호현찬경김은규황성우
Keywords
nano-mold
Issue Date
2000-01
Publisher
Proc. 7th Korean Conf. on Semiconductors; 제 7 회 한국반도체 학술대회
Citation
, 321-322
URI
http://pubs.kist.re.kr/handle/201004/22807
Appears in Collections:
KIST Publication > Conference Paper
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