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dc.contributor.author박창민-
dc.contributor.author최범호-
dc.contributor.author현찬경-
dc.contributor.author김은규-
dc.contributor.author황성우-
dc.date.accessioned2015-12-02T07:49:00Z-
dc.date.available2015-12-02T07:49:00Z-
dc.date.issued200001-
dc.identifier.citation, 321-322-
dc.identifier.other11909-
dc.identifier.urihttp://pubs.kist.re.kr/handle/201004/22807-
dc.publisherProc. 7th Korean Conf. on Semiconductors-
dc.publisher제 7 회 한국반도체 학술대회-
dc.subjectnano-mold-
dc.titleA 40 nm nano-mold lithography-
dc.typeConference Paper-
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KIST Publication > Conference Paper
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