Microstructural and electrical property studies of Pb(Zr0.52Ti0.48)O3 films grown on p-InP (100) substrates by a radio-frequency magnetron-sputtering technique at low temperature

Title
Microstructural and electrical property studies of Pb(Zr0.52Ti0.48)O3 films grown on p-InP (100) substrates by a radio-frequency magnetron-sputtering technique at low temperature
Authors
김태환윤영수
Keywords
radio-frequency magnetron-sputtering
Issue Date
2000-01
Publisher
Journal of materials research
Citation
VOL 15, NO 1, 199-202
URI
http://pubs.kist.re.kr/handle/201004/22813
ISSN
0884-2914
Appears in Collections:
KIST Publication > Article
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