A study on Fabrication of Thermopile Infrared Detector

Title
A study on Fabrication of Thermopile Infrared Detector
Authors
이성준주병권이윤희서상희오영제김태윤김철주
Keywords
MEMS
Issue Date
2000-10
Publisher
새물리
Citation
VOL 41, NO 4, 260-264
URI
http://pubs.kist.re.kr/handle/201004/22816
ISSN
0374-4914
Appears in Collections:
KIST Publication > Article
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