MEMS 기술을 이용한 감지 및 제어기의 기술동향

Title
MEMS 기술을 이용한 감지 및 제어기의 기술동향
Authors
박세광김태송
Keywords
MEMS
Issue Date
2000-12
Publisher
전기전자학회지
Citation
VOL 49, NO 12, 10-15
URI
http://pubs.kist.re.kr/handle/201004/22849
Appears in Collections:
KIST Publication > ETC
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