Review of modified direct current plasma assisted chemical vapour deposition method(DC PACVD) for wafer scale free standing diamond film

Title
Review of modified direct current plasma assisted chemical vapour deposition method(DC PACVD) for wafer scale free standing diamond film
Authors
백영준이재갑이욱성은광용
Keywords
CVD diamond
Issue Date
2000-04
Publisher
The Int. Conf. On Metallurgical Coatings and Thin Films, April 10-14, 2000, San Diego, California, U
Citation
, ?-?
URI
http://pubs.kist.re.kr/handle/201004/22858
Appears in Collections:
KIST Publication > Conference Paper
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