Phase development of radio-frequency magnetron sputter-deposited Pb(Mg₁/₃Nb₂/₃)O₃-PbTiO₃ (90/10) thin films

Title
Phase development of radio-frequency magnetron sputter-deposited Pb(Mg₁/₃Nb₂/₃)O₃-PbTiO₃ (90/10) thin films
Authors
이전국박동균정덕수박종완박철순
Keywords
RF sputtering; Pb(Mg₁/₃Nb₂/₃)O₃-PbTiO₃ thin film; perovskite; nanocomposite
Issue Date
2000-07
Publisher
Journal of vacuum science & technology. A, Vacuum, surfaces, and films : an official journal of the American Vacuum Society
Citation
VOL 18, NO 4, 1659-1662
URI
http://pubs.kist.re.kr/handle/201004/22892
ISSN
0734-2101
Appears in Collections:
KIST Publication > Article
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