Preparration and characterization of organic-inorganic hybrid materials via sol-gel reaction for interlayer dielectrics

Title
Preparration and characterization of organic-inorganic hybrid materials via sol-gel reaction for interlayer dielectrics
Authors
백남석송영배김환규황승상홍순만
Keywords
organic-inorganic hybrid; poly(hydroxy-imide); interlayer dielectrics; termal expansion coefficient
Issue Date
2000-09
Publisher
Molecular crystals and liquid crystals science and technology. Section A, Molecular crystals and liquid crystals
Citation
VOL 349, 263-266
URI
http://pubs.kist.re.kr/handle/201004/22907
ISSN
1058-725X
Appears in Collections:
KIST Publication > Article
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