Preparration and characterization of organic-inorganic hybrid materials via sol-gel reaction for interlayer dielectrics
- Preparration and characterization of organic-inorganic hybrid materials via sol-gel reaction for interlayer dielectrics
- 백남석; 송영배; 김환규; 황승상; 홍순만
- organic-inorganic hybrid; poly(hydroxy-imide); interlayer dielectrics; termal expansion coefficient
- Issue Date
- Molecular crystals and liquid crystals science and technology. Section A, Molecular crystals and liquid crystals
- VOL 349, 263-266
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- KIST Publication > Article
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