Fabrication of 3D feed horn shape MEMS antenna array using MRPBI (mirror reflected parallel beam illuminator) system with an ultra-slow-rotated and inclined X-Y-Z stage

Title
Fabrication of 3D feed horn shape MEMS antenna array using MRPBI (mirror reflected parallel beam illuminator) system with an ultra-slow-rotated and inclined X-Y-Z stage
Authors
박종연김근태문성욱박정호
Keywords
MRPBI system; UV-lithography; IR sensor; 3D MEMS antenna
Issue Date
2001-11
Publisher
Proceedings of MRS
Citation
VOL 687, 113-124
URI
http://pubs.kist.re.kr/handle/201004/22929
Appears in Collections:
KIST Publication > Conference Paper
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