Studies on Formation of the Floating Membrane using SOI Wafer and Application to Fabrication of Thermopile Sensor

Title
Studies on Formation of the Floating Membrane using SOI Wafer and Application to Fabrication of Thermopile Sensor
Authors
이성준주병권이윤희서상희오명환김태윤김철주
Issue Date
2001-11
Publisher
새물리
Citation
VOL 43, S18-S22
URI
http://pubs.kist.re.kr/handle/201004/22934
ISSN
0374-4914
Appears in Collections:
KIST Publication > Article
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