Electrochemical and structural properties of radio frequency sputtered cobalt oxide electrodes for thin-film supercapacitors

Title
Electrochemical and structural properties of radio frequency sputtered cobalt oxide electrodes for thin-film supercapacitors
Authors
김한기성태연임재홍조원일윤영수
Keywords
thin-film; supercapacitor; Co3O4; LiPON electrolyte; gas-ratio; capacitance
Issue Date
2001-12
Publisher
Journal of power sources
Citation
VOL 102, NO 1-2, 167-171
Abstract
The electrochemical and structural properties of cobalt oxide films which are deposited at different sputtering gas-ratios of O2/(Ar+O2) are investigated. In order to examine the electrochemical properties of the as-deposited films, all solid-state thin-film supercapacitors (TFSCs) are fabricated. There consist of Co3O4 electrodes and an amorphous LiPON thin-film electrolyte. It is shown that the capacitance behaviour of the Co3O4/LiPON/Co3O4 TFSCs is similar to bulk-type supercapacitor behaviour. It is further shown that the electrochemical behaviour of the TFSCs is dependent on the sputtering gas-ratios. The gas-ratio dependence of the capacitance of the oxide electrode films is discussed based on X-ray diffraction (XRD) and electrical results for the Co3O4 films.
URI
http://pubs.kist.re.kr/handle/201004/22937
ISSN
0378-7753
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KIST Publication > Article
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