Effect of oxygen plasma treatment on anodic bonding

Title
Effect of oxygen plasma treatment on anodic bonding
Authors
Seung-Woo ChoiWoo-Beom Choi이윤희주병권Byong-Ho Kim
Keywords
oxygen
Issue Date
2001-03
Publisher
Journal of the Korean Physical Society
Citation
VOL 38, NO 3, 207-209
URI
http://pubs.kist.re.kr/handle/201004/22951
ISSN
0374-4884
Appears in Collections:
KIST Publication > Article
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