Effects of Bi content on electrical properties of Pt/SrBi//2Nb//2O//9/Si ferroelectric gate structure

Title
Effects of Bi content on electrical properties of Pt/SrBi//2Nb//2O//9/Si ferroelectric gate structure
Authors
김용태김성일최훈상김춘근이창우
Keywords
SBN
Issue Date
2001-06
Publisher
2001 Korea-japan Joint Workshop on Advanced Semiconductor Process and Equipment
Citation
, 9-12
URI
http://pubs.kist.re.kr/handle/201004/22980
Appears in Collections:
KIST Publication > Conference Paper
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