New antireflective coating materials containing a novel chromophore for KrF laser lithography

Title
New antireflective coating materials containing a novel chromophore for KrF laser lithography
Authors
안광덕한동근김준영하성현이대엽남종림
Keywords
antireflective coating(ARC); KrF lithography; bottom ARC (BARC) materials; isoflavone and flavone chromophores; isoflavone polymers as BARC materials
Issue Date
2001-08
Publisher
Journal of photopolymer science and technology; [Fotoporimā Konwakai shi]
Citation
VOL 14, NO 3, 475-480
URI
http://pubs.kist.re.kr/handle/201004/22997
ISSN
0914-9244
Appears in Collections:
KIST Publication > Article
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