New antireflective coating materials containing a novel chromophore for KrF laser lithography
- New antireflective coating materials containing a novel chromophore for KrF laser lithography
- 안광덕; 한동근; 김준영; 하성현; 이대엽; 남종림
- antireflective coating(ARC); KrF lithography; bottom ARC (BARC) materials; isoflavone and flavone chromophores; isoflavone polymers as BARC materials
- Issue Date
- Journal of photopolymer science and technology; [Fotoporimā Konwakai shi]
- VOL 14, NO 3, 475-480
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- KIST Publication > Article
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