Optical MEMS-MEMS 기술의 액츄에이터 응용 (III)

Title
Optical MEMS-MEMS 기술의 액츄에이터 응용 (III)
Authors
문성욱허재성
Keywords
MEMS; 액츄에이터
Issue Date
2002-11
Publisher
월간 반도체
Citation
VOL 11, 41-52
URI
http://pubs.kist.re.kr/handle/201004/23033
ISSN
1227-741X
Appears in Collections:
KIST Publication > ETC
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