Decomposition of tetrafluorocarbon in dielectric barrier discharge

Title
Decomposition of tetrafluorocarbon in dielectric barrier discharge
Authors
나병기최재욱이화웅송형근
Keywords
plasma; barrier discharge; CF4; COF2; global warming
Issue Date
2002-11
Publisher
Korean J. Chem. Eng.
Citation
VOL 19, NO 6, 917-920
URI
http://pubs.kist.re.kr/handle/201004/23039
ISSN
0256-1118
Appears in Collections:
KIST Publication > Article
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