High frequency response of bragg reflector type film bulk acoustic wave resonator

Title
High frequency response of bragg reflector type film bulk acoustic wave resonator
Authors
김주형이시형안진호이전국
Keywords
bragg reflector; FBAR; AlN
Issue Date
2002-08
Publisher
Integrated Ferroelectrics
Citation
VOL 41, 145-154
Abstract
We fabricated a Bragg reflector type FBAR using AlN piezoelectric with quarter wavelength thickness, where the Bragg reflector was composed of W-SiO2 pairs. By numerical simulation considering actual acoustic losses of each layer, we analyzed the frequency response of the resonator and could explain it using an equivalent circuit with parasitic elements. The Effective electromechanical coupling constant (K 2 eff ) and the Quality factor (Qs ), figures of merit of the resonator, were about 1.1% and 307, respectively.</ab>
URI
http://pubs.kist.re.kr/handle/201004/23050
ISSN
1058-4587
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KIST Publication > Article
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