Effects of deposition temperature and annealing process on PZT thin films prepared by pulsed laser deposition

Title
Effects of deposition temperature and annealing process on PZT thin films prepared by pulsed laser deposition
Authors
김민철최지원강종윤윤석진김현재윤기현
Keywords
PZT thin films
Issue Date
2002-03
Publisher
Transactions on Electrical and Electronic Materials
Citation
VOL 3, NO 1, 14-17
URI
http://pubs.kist.re.kr/handle/201004/23063
Appears in Collections:
KIST Publication > Article
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