Enhancement of optical properties of InGaAs/GaAs self-assembled quantum dots by thermal annealing with a SiNx/SiO ₂ capping layer

Title
Enhancement of optical properties of InGaAs/GaAs self-assembled quantum dots by thermal annealing with a SiNx/SiO ₂ capping layer
Authors
J.H. Lee최원준박용주한일기이정일조운조E.K. KimC.M. LeeH.-W. Kim
Issue Date
2002-06
Publisher
7th International Conference on Nanometer-scale Science and Technology & 21st European Conference on
URI
http://pubs.kist.re.kr/handle/201004/23095
Appears in Collections:
KIST Publication > Conference Paper
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