An analytical model for intrinsic residual stress effect on out-of-plane chemical-vapor-deposited free-standing thick film.

Title
An analytical model for intrinsic residual stress effect on out-of-plane chemical-vapor-deposited free-standing thick film.
Authors
정증현백영준권동길
Issue Date
2002-07
Publisher
Materials Research Society symposia proceedings
Citation
v. 695, 285-290.
URI
http://pubs.kist.re.kr/handle/201004/23105
Appears in Collections:
KIST Publication > Conference Paper
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