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dc.contributor.author심현상-
dc.contributor.author김용태-
dc.contributor.author전형탁-
dc.date.accessioned2015-12-02T07:50:40Z-
dc.date.available2015-12-02T07:50:40Z-
dc.date.issued200208-
dc.identifier.citation, 67-67-
dc.identifier.other16748-
dc.identifier.urihttp://pubs.kist.re.kr/handle/201004/23117-
dc.publisherAVS Topical Conference on Atomic Layer Deposition-
dc.subject펄스플라즈마-
dc.subject원자층증착-
dc.subjectcu-interconnect-
dc.subjectdiffusion barrier기술-
dc.titleCharacteristics of pulse plasma enhanced atomic layer deposition of tungsten nitride diffusion barrier for copper interconnect-
dc.typeConference Paper-
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