Enhancement of emission characteristics for field-emitter arrays by optimizing the etched feature of the gate electrode

Title
Enhancement of emission characteristics for field-emitter arrays by optimizing the etched feature of the gate electrode
Authors
김훈서상원이주원박종원이윤희장진주병권
Keywords
Thin Chromiun film; substrate temperature; Cr-gate electrode
Issue Date
2003-01
Publisher
Journal of Vacuum Science and Technology B
Citation
v. 21, 186-192
URI
http://pubs.kist.re.kr/handle/201004/23132
ISSN
1071-1023
Appears in Collections:
KIST Publication > Article
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