Low-energy ion beam treatment of α-Al2O3 (0001) and improvement of photoluminescence of ZnO thin films

Title
Low-energy ion beam treatment of α-Al2O3 (0001) and improvement of photoluminescence of ZnO thin films
Authors
박종용노영수박병진이현우최지원김진상Y. Ermakov윤석진오영제최원국
Keywords
ZnO thin film; Low-energy ion beam; Al2O3; ZnO; Al-O-N; AlN; PL; PLD
Issue Date
2003-08
Publisher
The 7th Korea-China Workshop on Advanced Materials
Citation
, 87-92
URI
http://pubs.kist.re.kr/handle/201004/23210
Appears in Collections:
KIST Publication > Conference Paper
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