Fabrication of 3D MEMS antenna for IR detector using novel UV-lithography, plastic micro machining and mesh structure bonding technique

Title
Fabrication of 3D MEMS antenna for IR detector using novel UV-lithography, plastic micro machining and mesh structure bonding technique
Authors
박종연김근태문성욱박정호
Keywords
plastic micromachining; PDMS; 3D MEMS; UV-lithography; mesh structure bonding
Issue Date
2003-09
Publisher
17th European Conference on Solid-State Transducers
URI
http://pubs.kist.re.kr/handle/201004/23218
Appears in Collections:
KIST Publication > Conference Paper
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