Origin of residual stress in the formation of boron nitride film by sputtering with Ar ions

Title
Origin of residual stress in the formation of boron nitride film by sputtering with Ar ions
Authors
김홍석박종극백영준최인훈
Keywords
boron nitride film; residual stress; cBN; Ar ion
Issue Date
2003-09
Publisher
Journal of Applied Physics
Citation
VOL 94, NO 5, 3057-3060
URI
http://pubs.kist.re.kr/handle/201004/23225
ISSN
0021-8979
Appears in Collections:
KIST Publication > Article
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