Role of AlN piezoelectric crystal orientation in solidly mounted film bulk acoustic wave resonators

Title
Role of AlN piezoelectric crystal orientation in solidly mounted film bulk acoustic wave resonators
Authors
이시형강성철한상철주병권윤기현이전국
Keywords
AlN; solidly mounted resonator
Issue Date
2003-04
Publisher
한국세라믹학회지; Journal of the Korean Ceramic Society
Citation
v. 40, no. 4 ., 393-397
URI
http://pubs.kist.re.kr/handle/201004/23306
Appears in Collections:
KIST Publication > Article
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