Formation of crack-free MoSi₂/α -Si₃N₄ composite coating on Mo substrate by ammonia nitridation of Mo5Si3 layer followed by chemical vapor deposition of Si.

Title
Formation of crack-free MoSi₂/α -Si₃N₄ composite coating on Mo substrate by ammonia nitridation of Mo5Si3 layer followed by chemical vapor deposition of Si.
Authors
윤진국김긍호변지영이종권김재수
Keywords
ammonia nitridation and CVD of Si
Issue Date
2003-02
Publisher
Surface and Coatings Technology
Citation
v. 165, no. 1, 81-89.
URI
http://pubs.kist.re.kr/handle/201004/23332
ISSN
0257-8972
Appears in Collections:
KIST Publication > Article
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