Biological element detection sensor application of micromachined PZT thick film cantilever

Title
Biological element detection sensor application of micromachined PZT thick film cantilever
Authors
김형준Yong-Bum KimJaebum Park김태송
Keywords
thick film; PZT; cantilever; biochip
Issue Date
2003-10
Publisher
IEEE Sensors 2003, Book of Abstracts
Citation
, 353-354
URI
http://pubs.kist.re.kr/handle/201004/23358
Appears in Collections:
KIST Publication > Conference Paper
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