Thermal treatment of InGaAs/GaAs self-assembled quantum dots with SiNx and SiO ₂ capping layers

Title
Thermal treatment of InGaAs/GaAs self-assembled quantum dots with SiNx and SiO ₂ capping layers
Authors
J.H. Lee최원준박용주한일기이정일조운조E.K. KimC.M. LeeH.-W. Kim
Issue Date
2002-08
Publisher
The 11th Seoul International Symposium on the Physics of Semiconductors and Applications
Citation
, 235-235
URI
http://pubs.kist.re.kr/handle/201004/23400
Appears in Collections:
KIST Publication > Conference Paper
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