Single-cathode DC PACVD process for large area diamond wafer fabrication.

Title
Single-cathode DC PACVD process for large area diamond wafer fabrication.
Authors
백영준채기웅이욱성
Issue Date
2002-07
Publisher
Proc. the 8th International Conference New Diamond Science and Technology 2002
URI
http://pubs.kist.re.kr/handle/201004/23408
Appears in Collections:
KIST Publication > Conference Paper
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