Thermal and load-deflection FE analysis of parylene diaphragms

Title
Thermal and load-deflection FE analysis of parylene diaphragms
Authors
Wonchul Sim김병규Bumkyoo Choi박종오
Keywords
parylene; corrugated diaphragm; load-deflection; residual stress
Issue Date
2002-04
Publisher
Technical Proceedings of Fifth International Conference on Modeling and Simulation of Microsystems 2
Citation
VOL 8, NO 4, 210-213
URI
http://pubs.kist.re.kr/handle/201004/23467
Appears in Collections:
KIST Publication > Conference Paper
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