Indium tin oxide surface smoothing by gas cluster ion beam

Title
Indium tin oxide surface smoothing by gas cluster ion beam
Authors
송재훈최덕균최원국
Keywords
cluster ion; surface smoothing; Hillocks; ITO; lateral sputtering
Issue Date
2002-11
Publisher
Nuclear Instruments and Methods in Physics Research B
Citation
VOL 196, NO 3-4, 275-278
URI
http://pubs.kist.re.kr/handle/201004/23525
ISSN
0168-583X
Appears in Collections:
KIST Publication > Article
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