Influence of electrode configurations on the quality factor and piezoelectric coupling constant of solidly mounted bulk acoustic wave resonators.

Title
Influence of electrode configurations on the quality factor and piezoelectric coupling constant of solidly mounted bulk acoustic wave resonators.
Authors
이시형윤기현이전국
Keywords
piezoelectric thin film
Issue Date
2002-10
Publisher
Journal of Applied Physics
Citation
VOL 92, NO 7, 4062-4069
URI
http://pubs.kist.re.kr/handle/201004/23537
ISSN
0021-8979
Appears in Collections:
KIST Publication > Article
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