Effect of ammonia nitridation on the microstructure of MoSi ₂ coatings formed by chemical vapor deposition of Si on Mo substrates

Title
Effect of ammonia nitridation on the microstructure of MoSi ₂ coatings formed by chemical vapor deposition of Si on Mo substrates
Authors
윤진국이종권변지영김긍호백영현김재수
Keywords
CVD; ammonia nitridation; MoSi2-Si3N4; composite coating; microstructure
Issue Date
2002-10
Publisher
Surface and Coatings Technology
Citation
VOL 160, NO 1, 29-37
URI
http://pubs.kist.re.kr/handle/201004/23546
ISSN
0257-8972
Appears in Collections:
KIST Publication > Article
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