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dc.contributor.author윤진국-
dc.contributor.author이종권-
dc.contributor.author변지영-
dc.contributor.author김긍호-
dc.contributor.author백영현-
dc.contributor.author김재수-
dc.date.accessioned2015-12-02T07:52:45Z-
dc.date.available2015-12-02T07:52:45Z-
dc.date.issued200210-
dc.identifier.citationVOL 160, NO 1, 29-37-
dc.identifier.issn0257-8972-
dc.identifier.other15434-
dc.identifier.urihttp://pubs.kist.re.kr/handle/201004/23546-
dc.publisherSurface and Coatings Technology-
dc.subjectCVD-
dc.subjectammonia nitridation-
dc.subjectMoSi2-Si3N4-
dc.subjectcomposite coating-
dc.subjectmicrostructure-
dc.titleEffect of ammonia nitridation on the microstructure of MoSi ₂ coatings formed by chemical vapor deposition of Si on Mo substrates-
dc.typeArticle-
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