Structure and properties of Si incorporated tetrahedral amorphous carbon films prepared by hybrid filtered vacuum arc process

Title
Structure and properties of Si incorporated tetrahedral amorphous carbon films prepared by hybrid filtered vacuum arc process
Authors
이철승이광렬은광용윤기현한준희
Keywords
tetrahedral amorphous carbon
Issue Date
2002-01
Publisher
Diamond and Related Materials
Citation
VOL 11, NO 1, 198-203
URI
http://pubs.kist.re.kr/handle/201004/23554
ISSN
0925-9635
Appears in Collections:
KIST Publication > Article
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