Co-silicide device characteristics in embedded DRAM

Title
Co-silicide device characteristics in embedded DRAM
Authors
김종채Yeong-Cheol Kim김병국
Keywords
co-silicide
Issue Date
2001-09
Publisher
Korean Journal of Crystallography; 한국결정학회지
Citation
VOL 12, NO 3, 162-165
URI
http://pubs.kist.re.kr/handle/201004/23572
ISSN
1229-8700
Appears in Collections:
KIST Publication > Article
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