Evaluation of origin for trace organic contaminants adsorbing on the surface of silicon wafers in manufacturing line by home-built thermal desorption and P&T GC-MS

Title
Evaluation of origin for trace organic contaminants adsorbing on the surface of silicon wafers in manufacturing line by home-built thermal desorption and P&T GC-MS
Authors
박현미김영만류재천정찬성이대운이강봉
Issue Date
2001-08
Publisher
2001 Asianalyisis VI Conference Abstract
URI
http://pubs.kist.re.kr/handle/201004/23589
Appears in Collections:
KIST Publication > Conference Paper
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