A novel UV-LIGA process using PMER as a mold material for optical switch application

Title
A novel UV-LIGA process using PMER as a mold material for optical switch application
Authors
채경수김희연문성욱한승호박정호
Keywords
PMER
Issue Date
2001-06
Publisher
Transducers '01 Eurosensors XV
URI
http://pubs.kist.re.kr/handle/201004/23619
Appears in Collections:
KIST Publication > Conference Paper
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