Characteristic of tungsten nitride atomic layer deposition

Title
Characteristic of tungsten nitride atomic layer deposition
Authors
심현상김용태전형탁
Keywords
atomic layer deposition
Issue Date
2001-05
Publisher
Atomic Layer Deposition(ALD2001) Conference
URI
http://pubs.kist.re.kr/handle/201004/23633
Appears in Collections:
KIST Publication > Conference Paper
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