The loss kinetics of substitutional carbon in Si1-χCχ regrown by solid phase epitaxy

Title
The loss kinetics of substitutional carbon in Si1-χCχ regrown by solid phase epitaxy
Authors
Yong Jenong KimTae Joon KimTae-Kyung KimByungwoo Park송종한
Keywords
SPE; Si1-xCx; substitutional carbon; activation energy; loss kinetics
Issue Date
2001-02
Publisher
Japanese Journal of Applied Physics, Part 1- Regular Papers
Citation
VOL 40, NO 2A, 773-776
URI
http://pubs.kist.re.kr/handle/201004/23677
ISSN
0021-4922
Appears in Collections:
KIST Publication > Article
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