Plsma chemistries for dry etching of SrBi ₂ Ta ₂ O//9 thin films

Title
Plsma chemistries for dry etching of SrBi ₂ Ta ₂ O//9 thin films
Authors
J. S. ParkY. H. ImR. J. ChoY. B. HahnC. S. Choi이시형이전국
Keywords
dry etching
Issue Date
2001-12
Publisher
Electrochemical and solid-state letters
Citation
VOL 4, NO 2, G17-G19
URI
http://pubs.kist.re.kr/handle/201004/23683
ISSN
1099-0062
Appears in Collections:
KIST Publication > Article
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