Improved crystalline quality of GaN by substrate ion beam pre-treatment

Title
Improved crystalline quality of GaN by substrate ion beam pre-treatment
Authors
Dongjin ByunYong Suk ChoJaekyun Kim박용주김은규김긍호Eui-kwan KohSuk-Ki Min
Issue Date
2001-11
Publisher
Digest papers on Microprocesses and Nanotechnology 2001
Citation
, 220-221
URI
http://pubs.kist.re.kr/handle/201004/23701
Appears in Collections:
KIST Publication > Conference Paper
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