Electromechanical characterization of micromachined PZT cantilever

Title
Electromechanical characterization of micromachined PZT cantilever
Authors
이정훈윤기현김태송
Keywords
PZT
Issue Date
2001-10
Publisher
Proceedings of the International Sensor Conference 2001
Citation
, 43-44
URI
http://pubs.kist.re.kr/handle/201004/23719
Appears in Collections:
KIST Publication > Conference Paper
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