Effects of current wave forms and current densities on the electroplated Cu interconnection in damascene plating

Title
Effects of current wave forms and current densities on the electroplated Cu interconnection in damascene plating
Authors
이유용박영준조병원이재봉
Keywords
Cu interconnects; superfilling; electroplating
Issue Date
2001-10
Publisher
Proceedings of the 12th Asia Pacific Corrosion Control Conference
Citation
, 122-132
URI
http://pubs.kist.re.kr/handle/201004/23723
Appears in Collections:
KIST Publication > Conference Paper
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